Defect Factor

Setup Factor

Utilities Factor

Test Factor

FA Factor

Central Factor

Bit Factor

Pixel Factor

Files Supported by OneFactor-e

In an effort to fit seamlessly into most analysis systems, the OneFactor-e product line is able to read and write several common and custom file formats. The supported file formats are broken down into functional areas

Defect File Formats

('xx' denotes multiple model numbers)

Type

Description

Versions Suggested Equipment OneFactor-e Module Support Read Write Modify
TFF Tencor File Format 1.0 + KLA-Tencor : 7700, 6400, AIT-1, AIT-2, Swift Station, Klarity, Quest, 25xx; Applied Materials(Orbot) , ADE ; TSK Defect Factor , Bit Factor , FA Factor Yes Yes Yes
KLARF KLA Results File 1.1,1.2 KLA-Tencor : 21xx, 25xx, Swift Station, Klarity, Quest; August ; Inspex Defect Factor , Bit Factor , FA Factor Yes Yes Yes

Image File Formats

Type

Description

Versions OneFactor-e Module Support Read Write Modify
JPEG

16 bit, 24 bit

color (Adobe)

All Defect Factor , Test Factor , Utilities Factor Yes Yes Yes
Windows Bitmap 2,8,16,34 bit color, gray, monochrome All Defect Factor , Test Factor , Utilities Factor , Bit Factor Yes Yes Yes
TIFF 2,8,16,34 bit color, gray, monochrome (Adobe) 6.0 Defect Factor , Utilities Factor Yes Yes Yes
GIF

Compuserve, umcompressed.

256 color, 24 bit

85a Defect Factor , Test Factor , Utilities Factor Yes Yes Yes

Design File Formats

Type

Description

Versions OneFactor-e Module Support Read Write Modify
GDS-II

Cadence stream file format

All Defect Factor , Bit Factor Yes Yes Yes

Other File Formats

Type

Description

Versions OneFactor-e Module Support Read Write Modify
HTML Hyper Text Markup Language; used as communicating vehicle of Internet 3.0, 4.0 All Yes No No
XML

e-commerce data files, used in OneFactor-e as setup and data files

1.0 All Yes Yes Yes

 

 

   

 

 

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